| 摘要 |
PURPOSE: A slit door assembly of a dry etcher is provided to prevent particles on a wafer, by forming a supporting unit and a coupling part as one body, so that both side surfaces of the supporting unit are completely coupled to a coupling part protruded in the slit door. CONSTITUTION: A slit door assembly includes a supporting unit(21) and a slit door(22). The supporting unit has a coupling hole(21a) so that the supporting unit is coupled by a fixing bolt(14) at an upper portion of a bellows(11). Two coupling parts(22b) contacting both sides of the supporting unit are protruded at a side surface of the flat type door body, so that the supporting unit and the slit door are formed as one body.
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