| 摘要 |
PURPOSE: An electric static chuck assembly for manufacturing a semiconductor is provided to prevent a damage of a wafer by changing a material of a lift pin and an inner condition of a process chamber. CONSTITUTION: An electric static chuck assembly for manufacturing a semiconductor comprises an electric static chuck(20), a multitude of lift pin(21,100), and a high frequency power supply portion(14). The electric static chuck(20) is installed within a process chamber(10) for providing and exhausting a process gas. The lift pins(21,100) are installed at the electric static chuck(20) in order to load and unload a wafer(30) to the electric static chuck(20). The high frequency power supply portion(14) applies the high frequency power to the process chamber(10).
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