| 摘要 |
PURPOSE: A variable super high frequency filter using a micro mechanical structure is provided to integrate active elements on a semiconductor chip, reduce the loss while delivering signals, improve distribution, and vary linear frequency band widely. CONSTITUTION: A variable super high frequency filter includes three unit resonance cells(34,35,36). The first unit resonance cell(34) includes an inductor(28) passing high frequency selectively, a capacitor(29) passing low frequency selectively, a distribution line and a variable capacitor having a semiconductor micro mechanical structure converting middle frequency by varying capacitance. Coupling these unit resonance cells adequately produces the total filter. The distribution(30) uses a microstripline or a coplana waveguide.
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