ANTI-LOOSENESS SCREW FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: An anti-looseness screw for semiconductor manufacturing equipment is provided to prevent fine errors by preventing a loosing effect of a combination part between a vibration isolator and an align bridge. CONSTITUTION: An anti-looseness screw for semiconductor manufacturing equipment comprises a screw body(14), a fixing nut(16), and a locking screw(18). The screw body(14) is inserted into a penetrating hole(10a) of a fixing body(10) and a combination hole(12a) of a fixed object(12). The fixing nut(16) having a ring shape is installed at a pillar between a screw thread(14a) and a head part(14b) of the screw body(14). The fixing nut(16) is formed with a multitude of locking hole(16a). The locking screw(18) is combined with the locking holes(16a) of the fixing nut(16) in order to fix the fixing body(10) and the fixed body(12).