THIN FILM OF SINGLE-GRANULAR STRUCTURE FOR MAGNETIC SENSOR

摘要

PURPOSE: A thin film of a single-granular structure for a magnetic sensor is provided to form a magnetic thin film by using a perovskite manganese oxide layer instead of an existing colossal magneto-resistance having a triple layer structure. CONSTITUTION: A thin film of a single-granular structure for a magnetic sensor comprises the following structure. A La0.67(Sr,Ba)0.33MnO3 perovskite manganese oxide layer of a single-granular structure is formed on a polycrystalline substrate. The manganese oxide layer has a prominent magneto-resistance under a low magnetic field and a normal temperature. The polycrystalline substrate is formed with any one of a polycrystalline Si/SiO2 or a YSZ(Yttrium Stabilized Zirconia).