ION IMPLANTER HAVING TURBO PUMP AND LAUGHING PUMP

摘要

PURPOSE: An ion implanter having a turbo pump and a laughing pump is provided to minimize a damage of a turbo pump by improving a structure of an existing ion implanter. CONSTITUTION: An ion implanter comprises a turbo pump(40), a laughing pump(60), a laughing line(62), and the first valve(64). An inside of a beam line chamber(30) is changed to a high vacuum status by the turbo pump(40). The inside of the beam line chamber(30) is changed to a low vacuum status by the laughing pump(60). The laughing line(62) connects directly the laughing pump(60) with the turbo pump(40). The first valve(64) is installed at the laughing line(62). The laughing line(62) is opened and shut by the first valve(64).