CATHODE ARC SOURCE AND ARC DEPOSITION APPARATUS

摘要

PURPOSE: A cathode arc source and an arc deposition apparatus are provided to simultaneously increase safety of arc and use efficiency of a target by controlling transferring speed and position of arc spot formed on surface of cathode using permanent magnet and electromagnet in cathode arc, particularly by flowing electric current having triangle wave and sinewave into electromagnetic surrounding the cathode. CONSTITUTION: The cathode arc source comprises a cathode (3) to which an arc power source is connected, a source electromagnet (4) installed around the cathode, an anode (5) oppositely directed to the cathode, a withdrawal electromagnetic (7) which is installed opposite to the cathode (3) for the anode (5) and has the same magnetic pole direction as the source electromagnet, and a permanent magnet (1) which is installed at back side of the cathode (3) and the opposite magnetic pole direction to the source electromagnet (4) and the withdrawal electromagnet (7).