PURPOSE: An alignment key is provided to prevent a crack effect generated from an alignment key formed on a scribe line by forming a dot pattern around an angled part of the alignment key. CONSTITUTION: An alignment key is formed on a scribe line of a semiconductor substrate. The alignment key has a structure of a rectangle shape and an angled part. The alignment key is formed by the same processes as an etching process and a deposition process performed on the semiconductor substrate. A dot pattern(D) is formed on the semiconductor substrate of a constant distant from the angled part of the alignment key. The angled part of the alignment key is surrounded by the dot pattern(D).
