发明名称 SYSTEM AND APPARATUS FOR REMOVING CHEMICALS
摘要 PURPOSE: A system and an apparatus for removing chemicals is provided to remove a deposit within an exhaust pipe arrangement by discharging forcibly chemicals from a tank. CONSTITUTION: A pipe(2) is connected with a tank(5) for storing water. A structure of a pipe arrangement(6) of the tank(5) is composed of a manual pipe arrangement(61) and an automatic pipe arrangement(63). A manual pipe arrangement valve(62) is adhered to the manual pipe arrangement(61). Air valves(64,65) are adhered to the automatic pipe arrangement(63). Air pumps(66,67) are connected with the air values(64,65), respectively. The air valves(64,65) are connected with a main discharge pipe arrangement(4). SOL valves(6a,6b) connects the air valves(64,65) with an air hose(68). SOL valves(6c,6d) are connects the air pumps(66,67) with the air hose(68).
申请公布号 KR20010035011(A) 申请公布日期 2001.05.07
申请号 KR20000059083 申请日期 2000.10.07
申请人 K-ENG CO., LTD. 发明人 KIM, DONG TAEK
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址