WAFER HOLDER AND EPITAXIAL GROWTH DEVICE

摘要

A wafer holder includes a susceptor made of SiC for holding a single wafer horizontally. A recessed holding part for receiving a wafer is formed in an upper part of the susceptor. Five through holes are provided in the susceptor around the holding part. A support member made of SiC is inserted into each of the through holes. The support member has its top, whose inner part (toward the holding part) provided with a cut to be engaged with the edge of the wafer. The support members are raised with respect to the susceptor by a lift mechanism. When a wafer is placed on the susceptor, the wafer edge is engaged with the cuts of the support members so that it is prevented from deviating horizontally.