EVACUATING METHOD BY DISCHARGING IONIZED GAS

摘要

PURPOSE: An evacuating method by discharging ionized gas is provided, which can achieve a low price vacuum pump by evacuating a system without oil at low cost. The momentum endowing method to ionized gas by using grid to apply electric field enables the accelerating potential to be controllable, and so can expel with much larger forcer than a turbo pump and make a vacuum pump of big discharge rate. CONSTITUTION: The method comprises the following steps: (i) ionizing gas in a vacuum pump by endowing momentum to the gas in the vacuum pump, the ionization being carried out at an electromagnetic field endowed with electric field by discharging by an electrode; and (ii) expelling the ionized gas from the inside of a chamber (10) to a gas outlet (14) for evacuating the chamber.