| 摘要 |
PURPOSE: A programmable region scanning vision inspecting system is provided to perform a precise defect test in a short interval of time and to shorten a manufacturing cycle when a plurality of semiconductor objects to be measured exist. CONSTITUTION: An inspecting system for scanning a region of a semiconductor device includes a scanning mechanism composed of a handler(100), a light source unit(130) and a camera. The scanning mechanism includes a charge coupled device(CCD) camera(120), a telescope, a zoom lens and a scan head(110). The CCD camera scans an object(10). The telescope enlarges the image of the object for monitoring, adhered to the CCD camera. The zoom lens controls a field of view of the CCD camera, coupled to the telescope. The scan head adjusts the field of vies to a shape and a size of the object, to move along the field of view of the CCD camera while moving the image to capture the image of the object, coupled to the zoom lens. The light source unit has a plurality of light source generating units(132) for generating light sources having different wavelengths. The light source unit includes a light source selecting switch box(134) which selects and outputs the light having a wavelength most suitable for the object according to the shape and the size of the object.
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