APPARATUS FOR EXHAUSTING LOADLOCK CHAMBER OF DRY ETCHER

摘要

PURPOSE: An apparatus for exhausting a loadlock chamber of a dry etcher is provided to intercept a back stream caused by pressure difference between chambers and to effectively prevent particles from being induced by the back stream, by connecting two loadlock chambers with a vacuum line. CONSTITUTION: An exhaust line(21) of an input loadlock chamber(11) and an exhaust line(23) of an output loadlock chamber(13) are unite and connected to a vacuum line(25) having a vacuum pump(27). A switching valve is installed in the respective exhaust lines. The respective exhaust lines includes a back stream prevention unit.