LOADLOCK CHAMBER OF DRY ETCHING EQUIPMENT

摘要

PURPOSE: A loadlock chamber of a dry etching equipment is provided to prevent particles from being adhered to a wafer, by making the particles inside the loadlock chamber exhausted along with air through a central portion of the wafer. CONSTITUTION: A loadlock chamber has a transfer arm and a pumping hole(35) which is a connection point with a vacuum line. The transfer arm is installed to transfer a wafer(20) between a process chamber and the loadlock chamber, and the wafer is loaded in the transfer arm. A plurality of the pumping holes are formed in a peripheral portion of the loadlock chamber.