发明名称 |
Cleaning device and treatment method for preventing oxidation in metal wire coating has a treatment cleaning container, a fluid reservoir to store cleaning fluid, feeder pipes to supply cleaning fluid and return-flow pipes. |
摘要 |
A cleaning device (22A-22D) has a cleaning container with a treatment area having a greater volume than an object to be treated. A fluid reservoir (30) stores cleaning fluid for treating an object. Feeder pipes (46A-46D) supply cleaning fluid from the fluid reservoir to the cleaning container. Return-flow pipes (47A-47D) return cleaning fluid from the cleaning container to the fluid reservoir.
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申请公布号 |
DE10038219(A1) |
申请公布日期 |
2001.05.03 |
申请号 |
DE2000138219 |
申请日期 |
2000.08.04 |
申请人 |
TOKYO ELECTRON LTD., TOKIO/TOKYO |
发明人 |
NIUYA, TAKAYUKI;ONO, MICHIHIRO;GOTOH, HIDETO;MORI, HIROYUKI |
分类号 |
H01L21/304;B08B3/12;H01L21/00;H01L21/311;H01L21/768;(IPC1-7):B08B3/00;H01L21/306;H01L21/68;G03F7/26 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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