发明名称 Cleaning device and treatment method for preventing oxidation in metal wire coating has a treatment cleaning container, a fluid reservoir to store cleaning fluid, feeder pipes to supply cleaning fluid and return-flow pipes.
摘要 A cleaning device (22A-22D) has a cleaning container with a treatment area having a greater volume than an object to be treated. A fluid reservoir (30) stores cleaning fluid for treating an object. Feeder pipes (46A-46D) supply cleaning fluid from the fluid reservoir to the cleaning container. Return-flow pipes (47A-47D) return cleaning fluid from the cleaning container to the fluid reservoir.
申请公布号 DE10038219(A1) 申请公布日期 2001.05.03
申请号 DE2000138219 申请日期 2000.08.04
申请人 TOKYO ELECTRON LTD., TOKIO/TOKYO 发明人 NIUYA, TAKAYUKI;ONO, MICHIHIRO;GOTOH, HIDETO;MORI, HIROYUKI
分类号 H01L21/304;B08B3/12;H01L21/00;H01L21/311;H01L21/768;(IPC1-7):B08B3/00;H01L21/306;H01L21/68;G03F7/26 主分类号 H01L21/304
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