发明名称 |
A DEVICE FOR MEASURING RELATIVE POSITION ERROR |
摘要 |
The invention relates to a device for measuring relative position error between a laser beam (14) and a target (10). The target (10) is provided with a circular orifice (16) occupying a reference position relative to said target (10). The device has means (12) for focusing the laser beam in the plane of said target, means (17) for taking an image of said circular hole and of the beam focused in the plane of said target, and means (18) for calculating the components of the segment joining said point of impact and the center of said hole.
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申请公布号 |
CA2324913(A1) |
申请公布日期 |
2001.05.03 |
申请号 |
CA20002324913 |
申请日期 |
2000.10.31 |
申请人 |
AUTOMA-TECH |
发明人 |
CLAVIER, DAVID;BOUREAU, DAMIEN |
分类号 |
G01B11/00;G03F7/20;G03F9/00;H05K1/02;H05K3/00;H05K3/06;(IPC1-7):G01M11/02;B23K26/04 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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