发明名称 A DEVICE FOR MEASURING RELATIVE POSITION ERROR
摘要 The invention relates to a device for measuring relative position error between a laser beam (14) and a target (10). The target (10) is provided with a circular orifice (16) occupying a reference position relative to said target (10). The device has means (12) for focusing the laser beam in the plane of said target, means (17) for taking an image of said circular hole and of the beam focused in the plane of said target, and means (18) for calculating the components of the segment joining said point of impact and the center of said hole.
申请公布号 CA2324913(A1) 申请公布日期 2001.05.03
申请号 CA20002324913 申请日期 2000.10.31
申请人 AUTOMA-TECH 发明人 CLAVIER, DAVID;BOUREAU, DAMIEN
分类号 G01B11/00;G03F7/20;G03F9/00;H05K1/02;H05K3/00;H05K3/06;(IPC1-7):G01M11/02;B23K26/04 主分类号 G01B11/00
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