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发明名称
Verfahren zur Registrierung mittels eines projizierenden optischen System, Belichtungsapparat zu dessen Durchführung und sowie Halbleiter-Herstellungsverfahren das diesen Belichtungsapparat verwendet
摘要
申请公布号
DE69329611(T2)
申请公布日期
2001.05.03
申请号
DE19936029611T
申请日期
1993.08.18
申请人
CANON K.K., TOKIO/TOKYO
发明人
KAWASHIMA, HARUNA
分类号
G03F7/207;G03F9/00;G03F9/02;(IPC1-7):G03F9/00
主分类号
G03F7/207
代理机构
代理人
主权项
地址
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