Apparatus and method for providing optical sensors with improved resolution

摘要

An optical sensor (10) comprised of an optical system (12) having a numerical aperture (NA) which provides a corresponding resolution and a detector array (28, 30) for providing high spatial resolution imaging data for use in improving said resolution, wherein said detector array (28, 30) has at least three detectors (14) which are spread across the central lobe (18) of the diffraction pattern which is determined by said numerical aperture (NA). <IMAGE>