| 摘要 |
<p>To provide a contact exposure device that does not require replacement of a interval setting means between a mask and workpiece, even if processing workpieces of different thickness, an interval setting means (10) between a mask and workpiece is provided which has an attachment member (10a) which is attached to a workpiece stage (WS) and a movable member (10b). The attachment member (10a) and the movable member (10b) are fitted together by screw threading. Consequently, the height can be adjusted by rotating the movable member (10b). The workpiece stage WS and a mask stage are separated from each other by a prescribed distance by the interval setting means (10), and the space between a mask and the workpiece (W) is depressurized. A gap is formed between the mask and workpiece (W) without contact even upon depressurization since the workpiece stage (WS) and the mask stage are separated a prescribed distance by the interval setting means (10). Workpiece (W) is floated using air in this state and exposure is carried out with the mask (M) adhered to workpiece (W). <IMAGE></p> |
