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发明名称
Composite particles and production process thereof, aqueous dispersion composition for chemical polishing, and process for manufacture of semiconductor device
摘要
申请公布号
EP1020488(A3)
申请公布日期
2001.05.02
申请号
EP20000100909
申请日期
2000.01.18
申请人
KABUSHIKI KAISHA TOSHIBA;JSR CORPORATION
发明人
YANO, HIROYUKI;MINAMIHABA, GAKU;MATSUI, YUKITERU;OKUMURA, KATSUYA;MOTONARI, MASAYUKI;HATTORI, MASAYUKI;IIO, AKIRA
分类号
C08G83/00;C08K3/34;C09G1/02;C09K3/14;H01L21/306;H01L21/3105;H01L21/321;(IPC1-7):C08G83/00;H01L21/02
主分类号
C08G83/00
代理机构
代理人
主权项
地址
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