发明名称 Light-source device and exposure apparatus
摘要 A light-source device can efficiently cool a light source without frequently exchanging an impurity removing filter. The light-source device includes a housing having an outer wall and an inner wall. A portion within the inner wall of the housing is substantially hermetically sealed with respect to a space formed by the outer wall and the inner wall. The device also includes a light source disposed within the inner wall, and an optical member. The light source guides light supplied from the light source to a portion outside of the housing. The device further includes a cooling unit for causing a fluid to flow between the outer wall and the inner wall of the housing to cool the light source.
申请公布号 US6224248(B1) 申请公布日期 2001.05.01
申请号 US19990310586 申请日期 1999.05.12
申请人 CANON KABUSHIKI KAISHA 发明人 CHIBA YUJI
分类号 G03F7/20;H01J61/52;H01L21/027;(IPC1-7):F21V8/00 主分类号 G03F7/20
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