发明名称 Stage system with driving mechanism, and exposure apparatus having the same
摘要 A driving system has a driving mechanism for producing a driving force, a drive controlling device for controlling the driving mechanism, and a temperature adjusting mechanism for collecting heat from the driving mechanism, wherein a cooling amount of the temperature adjusting mechanism is controlled on the basis of a signal applied from the drive controlling device to the driving mechanism. The cooling amount required for the driving mechanism or the amount of heat generation in the driving mechanism is predicted, on the basis of a signal applied to the driving mechanism, and the cooling amount is then controlled.
申请公布号 US6226073(B1) 申请公布日期 2001.05.01
申请号 US19990294327 申请日期 1999.04.20
申请人 CANON KABUSHIKI KAISHA 发明人 EMOTO KEIJI
分类号 G03F7/20;H01L21/027;H02K3/24;H02K9/19;H02K41/03;(IPC1-7):G03B27/42;G03B27/52;G21K5/00;G05F1/10;H02K41/00 主分类号 G03F7/20
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