发明名称 |
X-ray diffractometer method for determining thickness of multiple non-metallic crystalline layers and fourier transform method |
摘要 |
An x-ray diffractometry technique finds thickness of multiple layers of non-metallic crystalline material. A rocking curve is windowed to eliminate a main peak. The windowed curve is smoothed. The smoothed curve is subtracted from the windowed curve to yield a difference curve. The difference curve is transformed to make its average value zero and to constrain its endpoints to zero. A Fast Fourier transform is applied to the transformed difference curve. A thickness transform is applied to the result to yield a layer thickness.
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申请公布号 |
US6226348(B1) |
申请公布日期 |
2001.05.01 |
申请号 |
US19980211921 |
申请日期 |
1998.12.15 |
申请人 |
PHILIPS ELECTRONICS NORTH AMERICA CORPORATION |
发明人 |
SUMMERS JAMES ALEXANDER;MOORE CHRISTOPHER JOHN LAWRENCE |
分类号 |
G01B15/02;G01N23/20;(IPC1-7):G01N23/20 |
主分类号 |
G01B15/02 |
代理机构 |
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地址 |
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