| 摘要 |
The present invention provides techniques for processing effluent gases from vacuum fabrication processes. The effluent gases are condensed on cold surfaces (512 and 514) inside a novel pump (220) resulting in a high vacuum. The pump (220) can be connected to a vacuum fabrication processing chamber (210) and to a turbo molecular pump (275). The condensate which is formed on the cold surfaces of the pump (220) is subsequently evaporated to form regenerated gases during the regeneration of the pump. A pressure vessel (280) is removably connected to the pump during regeneration, causing the regenerated gases to fill the pump and the pressure vessel at pressures ranging from about 10,343 torr (200 psi) to about 103,430 torr ( 2,000 psi). The pressure vessel is closed when substantially all condensate has evaporated. The vessel containing regenerated gases can then be connected to an on-site or to a remote gas treatment facility for removal of noxious substances. In an additional embodiment, an effluent gas processing system (610) is provided, including a controller (600) which is adapted for interacting with a plurality of unit operations (620, 622, 624, 626 and 628) of the novel gas processing techniques.
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