| 摘要 |
A infra-red bolometer includes an active matrix level, a support level, a pair of posts and an absorption level. The active matrix level includes a substrate having a pair of connecting terminals. The support level includes a pair of bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes a serpentine bolometer element surrounded by an absorber and a serpentine stress balancing member formed at bottom of the absorber. The serpentine stress balancing member has an identical shape, a same material and rotated 90° with respect to the serpentine bolometer element to make the compressive stress in the absorber evenly distributed, preventing the absorber from being bent to thereby allow the bolometer to ensure an optimum absorption efficiency.
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