| 摘要 |
Device for exciting a gas comprising a hollow structure forming a waveguide, made of an electrically conductive material, connected to a microwave generator and including a passage for a hollow dielectric tube adapted for flow of the gas to be excited, the hollow structure further including a wave-concentrating region designed to concentrate microwave radiation produced by the generator onto the tube, during operation of the device, for the purpose of producing a surface wave plasma in the gas, at least one electromagnetic screening sleeve made of a conductive material, fastened to the hollow structure and extending along the extension of the passage so as to surround the hollow tube.
|
