发明名称 Short-wavelength electromagnetic-radiation generator
摘要 A short-wavelength electromagnetic-radiation generator includes a pair of concave reflectors, a laser source for emitting a laser beam so as to be incident between the concave reflectors, and an electron beam generator for emitting an electron beam so as to be incident on the laser beam, which is repeatedly reflected and converged.
申请公布号 US6226354(B1) 申请公布日期 2001.05.01
申请号 US19980195103 申请日期 1998.11.18
申请人 SONY CORPORATION 发明人 MAMINE TAKAYOSHI
分类号 H01L21/027;G03F7/20;G21K5/02;H05G2/00;(IPC1-7):G21G4/00 主分类号 H01L21/027
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