发明名称 Semiconductor device tester
摘要 In an IC tester comprising a tester part and a handler which includes two test stations or an IC tester comprising a tester part and two handlers, useless waiting times wasted by the tester part are eliminated. Means (SO) is provided for inputting a simultaneous measurement mode into the handler 2, and when the simultaneous measurement mode is inputted, the handler waits, in case the test preparation in the first test station 15a is completed and the test preparation in the second test station 15b is not completed, till the test preparation in the second station is completed, and when the test preparation in the second station is completed, the handler transmits the test preparation complete signals of both the stations to the tester part 1. The handler waits, in case the test preparation in the second station is completed and the test preparation in the first station is not completed, till the test preparation in the first station is completed, and when the test preparation in the first station is completed, the handler transmits the test preparation complete signals of both the stations to the tester part.
申请公布号 US6225798(B1) 申请公布日期 2001.05.01
申请号 US19980202467 申请日期 1998.12.15
申请人 ADVANTEST CORPORATION 发明人 ONISHI TAKESHI;SUZUKI KATUHIKO
分类号 G01R31/26;G01R31/01;G01R31/28;H01L21/66;(IPC1-7):G01R31/28 主分类号 G01R31/26
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