发明名称 |
Method for electrical shunt detection and removal on semiconductors |
摘要 |
An improved method of detecting and removing a shunt from a photoelectric semiconductor device comprises the steps of characterizing the device by generated data or performance graph; forward biasing the device; producing electromagnetic radiation from the device; receiving the radiation; associating a contrast in radiation to the defect; and mechanically removing the defect, whereby the defect is removed in the absence of a step of applying a chemical to the defect to assist in removing the defect.
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申请公布号 |
US6225640(B1) |
申请公布日期 |
2001.05.01 |
申请号 |
US19990323221 |
申请日期 |
1999.05.19 |
申请人 |
HUGHES ELECTRONICS CORPORATION |
发明人 |
GLENN GREGORY S.;RUPP MICHAEL L. |
分类号 |
G01N21/95;H01L31/18;(IPC1-7):H01L31/18;G01N21/88 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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