发明名称 Method for electrical shunt detection and removal on semiconductors
摘要 An improved method of detecting and removing a shunt from a photoelectric semiconductor device comprises the steps of characterizing the device by generated data or performance graph; forward biasing the device; producing electromagnetic radiation from the device; receiving the radiation; associating a contrast in radiation to the defect; and mechanically removing the defect, whereby the defect is removed in the absence of a step of applying a chemical to the defect to assist in removing the defect.
申请公布号 US6225640(B1) 申请公布日期 2001.05.01
申请号 US19990323221 申请日期 1999.05.19
申请人 HUGHES ELECTRONICS CORPORATION 发明人 GLENN GREGORY S.;RUPP MICHAEL L.
分类号 G01N21/95;H01L31/18;(IPC1-7):H01L31/18;G01N21/88 主分类号 G01N21/95
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