| 摘要 |
A charged particle beam test system identifies a fail signal generated at the predetermined timing for evaluating a semiconductor device under test (DUT). The charged particle beam test system includes a column for irradiating a beam pulse upon the DUT and detecting secondary electron emitted therefrom, an IC tester for supplying a test signal to the DUT and generating a trigger signal and comparing an output signal of the DUT with an expected signal and generating fail signals when output signal fails to match the expected signal, a sampling pulse generator for generating a sampling pulse for driving the column at a predetermined time after the trigger pulse, a fail signal separation circuit for identifying a fail signal generated at the specified timing, and a test result memory for storing measured data from the column representing an amount of secondary electron emitted from the DUT when the fail signal is received from the fail signal separation circuit.
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