发明名称 Microelectronic interconnect structures and methods for forming the same
摘要 An improved microelectronic interconnect structure and methods for forming the structure are disclosed. The microelectronic interconnect structure includes an organic-based coating that facilitates formation of electrical connections to the structure. The coating may be used to reduce oxidation of copper interconnects, which allows wire or bump attachment to the copper interconnect using conventional wire bonding or bump interconnect methods and apparatus. The coating is applied during a post chemical mechanical polishing process by placing the interconnect structure into a solution.
申请公布号 US6225681(B1) 申请公布日期 2001.05.01
申请号 US19990390445 申请日期 1999.09.07
申请人 CONEXANT SYSTEMS, INC. 发明人 CHUNGPAIBOONPATANA SURASIT;DAVIDSON CRAIG
分类号 H01L23/485;H05K3/28;(IPC1-7):H01L23/58;H01L23/48 主分类号 H01L23/485
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