Trenched gate semiconductor device and method for low power applications

摘要

A non-volatile semiconductor device structure and method for low power applications comprises a trenched floating gate and corner dopings and further includes a well junction region with a source region and a drain region therein, and includes a channel region, an inter-gate dielectric layer, and a control gate. The trenched floating gate is formed in a trench etched into the semiconductor substrate and has a top surface which is substantially planar with a top surface of the semiconductor substrate. The source and drain regions are laterally separated by the trench in which the trenched floating gate is formed and have a depth which is approximately less than the depth of the trench. The channel region is formed beneath a bottom surface of the trench and is doped to form a depletion type channel region. Corner dopings are diffusion regions formed adjacent to the source and drain regions of the semiconductor substrate and are immediately contiguous the upper vertical sides of the trench and the substrate surface.