| 发明名称 |
MANUFACTURE OF SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To staderize as much as possible, wiring patterns in multilayer structure on a semiconductor element and to obtain a desired connecting manner of a circuit at manufacturing of LSI. |
| 申请公布号 |
JPS52104882(A) |
申请公布日期 |
1977.09.02 |
| 申请号 |
JP19760021418 |
申请日期 |
1976.02.28 |
| 申请人 |
FUJITSU LTD |
发明人 |
MASUZAWA HIDEHO;OIMOTO TAKAMITSU;MUKAI MAKOTO;HAMADA KATSUYUKI;UEHARA TAKAO |
| 分类号 |
H01L21/3205;H01L21/82;H01L23/52;H01L23/538 |
主分类号 |
H01L21/3205 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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