| 发明名称 |
Improved cmp products |
| 摘要 |
Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives. |
| 申请公布号 |
AU7090000(A) |
申请公布日期 |
2001.04.30 |
| 申请号 |
AU20000070900 |
申请日期 |
2000.08.30 |
| 申请人 |
SAINT-GOBAIN CERAMICS AND PLASTICS, INC. |
发明人 |
AJAY K. GARG;BRAHMANANDAM V. TANIKELLA;WILLIAM R. DELANEY |
| 分类号 |
B24B57/02;B24B37/24;B24D3/00;B24D3/28;B24D3/34;C09G1/02;C09K3/14;H01L21/304 |
主分类号 |
B24B57/02 |
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