发明名称 APPARATUS FOR ANALYZING CUTS
摘要 A system for analyzing the quality of the sawing of a material which includes a scanning unit, a cut parameter identifier and a cut analyzer. The scanning unit scans along cuts of the material and views at least a portion of a cut. The cut parameter identifier identifies and stores parameters of the viewed cut portion. The cut analyzer analyzes the parameters of a multiplicity of viewed cut portions and which determines the quality of the cuts therefrom.
申请公布号 IL120656(A) 申请公布日期 2001.04.30
申请号 IL19970120656 申请日期 1997.04.13
申请人 INSPECTECH LTD. 发明人 MICHAEL GEFFEN;ABRAHAM BEN-HAR
分类号 G01N21/88;G01N21/956;G06F19/00;G06T7/00;H01L;H01L21/302;H01L21/66;H01L21/78;(IPC1-7):H01L21/302 主分类号 G01N21/88
代理机构 代理人
主权项
地址