| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for manufacturing a flexible semiconductor element, especially a solar battery, light in weight at a low cost with a simple device. SOLUTION: In this method for manufacturing the semiconductor element, a porous layer 2 is formed on a substrate 1, semiconductor layers 3, 4 and 5 are formed on the porous layer, a supporting substrate 11 is adhered to the semiconductor layers and then the substrate is peeled off at the part of the porous layer. Silica-containing layers 13 and 54 are formed by applying solution containing silica to the surface of the semiconductor layer 3 where the substrate is peeled off and protective films 13 and 54 composed of silicon oxide are formed by irradiating the silica-containing layers with ultraviolet rays and oxidizing the silica in the silica-containing layers by generated ozone.</p> |
