REFLECTING SOFT X-RAY MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a reflecting X-ray microscope using an image-forming optical system provided with a convex mirror and a concave mirror and capable of observing an image of a sample placed approximately perpendicular to an optical axis yet in a reflecting position. SOLUTION: The reflecting X-ray microscope includes the convex mirror 1 constituting a Schwarzschild optical system, the concave mirror 2 provided with an aperture 8 and a diaphragm 9 for preventing illuminating light 5 from being blocked by the optical system, and an image detector 4.