| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer prober, which is lightweight, superior in heat-up characteristics and cool-down characteristics, and moreover, does not generate warpages, even when a probe card is pressed, can effectively prevent the generation of breakages in a silicon wafer and mistakes in measurement and is suitable to mass production of the prober having a constant quality. SOLUTION: A wafer prober is characterized in that a conductor layer is formed on the surface of a polycrystalline ceramic board.
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