SHOCK PRESSURE RESISTANT STRUCTURE OF PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To protect a semiconductor pressure sensor from a shock of a water hammer or the like. SOLUTION: The pressure sensor 60 having a semiconductor pressure sensor chip covered with a plastic cover 73 is housed in an box-shaped installation plate 75 as a pressure sensor installation member, and a buffer member 1 is interposed between the plastic cover 73 of the pressure sensor 60 and the installation plate 75 to protect the pressure sensor 60 from a shock of a water hammer or the like.