发明名称 THIN-FILM TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To eliminate difference in brightness within a panel surface by reducing leak current, when a thin-film transistor is off and to improve minute machining accuracy and mating accuracy of photolithographic technique, according to the tendency toward making TFT fine. SOLUTION: In this semiconductor of a thin-film transistor formed on an insulation substrate, the film thickness of source and drain pats is made larger than the film thickness of a semiconductor part directly below or above a gate electrode via a gate insulation film.
申请公布号 JP2001119033(A) 申请公布日期 2001.04.27
申请号 JP19990299512 申请日期 1999.10.21
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NISHITANI MIKIHIKO;GOTO SHINJI
分类号 H01L29/786;H01L21/336;(IPC1-7):H01L29/786 主分类号 H01L29/786
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