| 发明名称 |
WAFER PROBER AND CERAMIC BOARD USED FOR THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer prober, capable of preventing impurities contained in a chuck top conductor layer or a ceramic board from being diffused into a silicon wafer. SOLUTION: A conductor layer is formed on a ceramic board which is used for a wafer prober, and a noble layer is formed on the surface of the conductor layer.
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| 申请公布号 |
JP2001118891(A) |
申请公布日期 |
2001.04.27 |
| 申请号 |
JP20000240814 |
申请日期 |
2000.08.09 |
| 申请人 |
IBIDEN CO LTD |
发明人 |
ITO ATSUSHI;HIRAMATSU YASUJI;ITO YASUTAKA;FURUKAWA MASAKAZU |
| 分类号 |
G01R1/073;F25B21/02;F25D1/00;G01R31/28;H01L21/66;H05B3/10;H05B3/12;H05B3/18;H05B3/20;(IPC1-7):H01L21/66 |
主分类号 |
G01R1/073 |
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