| 摘要 |
PROBLEM TO BE SOLVED: To provide a twin arm robot having a constitution wherein arm selecting mechanism whose action is sure and structure is simple is installed and a sensor wiring is easily led out to the outside of the robot, and to improve throughput by reducing the carrying-in and carrying-out time of a wafer to a treatment chamber. SOLUTION: A stop position of carrying equipment is set as a dead position. The carrying equipment is moved to a slewing position and is slewed when slewing is performed. When a wafer 6 is changed, an upper and a lower carriers 4, 5 are made to progress from the dead position. In arm selecting mechanism, the carriers 4, 5 are made still by applying torque in the direction opposite to the rotating direction of the arm, to pulleys 41, 42 which are linked to upper and lower arms 2a, 2b, 2c, 2d to be driven with wires 45, 46. The carriers 4, 5 are made progress by fixing the pulleys 41, 42 to a static system. As a result, twin arm carrying equipment of low cost can be provided since the arm selecting mechanism wherein action is sure and structure is simple is installed. |
