| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier and a carrying method for inspecting equipment in which the body size can be reduced by making the carrying passage narrower as compared with a conventional one. SOLUTION: The carrier for an inspection equipment of a device 16 mounted on a carriage comprises a plurality of carriage units 4 being coupled separably into a carriage, a mechanism 5 for assembling a carriage by coupling the carriage units 4 while arranging prior to inspection, means 6 for separating the plurality of carriage units 4 constituting the carriage following to inspection, and means for carrying the separated carriage units 4 toward the arranging/ assembling mechanism 5.
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