MICRO ELECTROMECHANICAL OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a micro electromechanical optical device capable of controlling motion of a connected optical device. SOLUTION: This micro electromechanical optical device is disclosed. The micro electromechanical optical device includes micro electromechanical structure connected with the optical device. Both of the micro electromechanical structure and the optical device are arranged on the surface of a substrate. The optical device is raised above a plane of the surface of the substrate by a prescribed distance by the micro electromechanical structure. After that, the raised optical device is operated relatively to the plane of the surface of the substrate in response to an electrostatic field generated between the optical device and the substrate.