| 摘要 |
PROBLEM TO BE SOLVED: To dry a coating film by preventing the expansion of the liquid pool produced in a coating application stage. SOLUTION: In the coating application stage, a conductive substrate is immersed into a coating application vessel 1 filled with a coating liquid for a photosensitive layer containing a solvent and is then pulled up, by which a coating liquid film is formed on its surface. In the next preheating stage, the substrate is placed onto a pallet previously heated to a prescribed temperature by passing a drying furnace 3 or by a heating controller that the pallet itself possesses, by which the bottom end in at least its coating application direction is heated. In the next drying stage, the substrate kept placed on the pallet is transported in this state to the drying furnace 3 where the coating liquid film is heated and dried. The preheating temperature is set at a temperature lower by 5 to 25 deg.C than the boiling point of the solvent, a temperature at which the saturated vapor pressure of the solvent attains 300 to 600 mmHg or at a temperature lower by 35 to 60 deg.C than the drying temperature. The bottom of the pallet is provided with a heat storage member. The coating liquid contains the solvent having the boiling point of >=50 deg.C or a non-halogen-base solvent. The thickness of the photosensitive layer film is >=20μm.
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