MULTILAYER CERAMIC ELECTROSTATIC CHUCK HAVING INTERNAL CHANNEL

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic ceramic chuck and a manufacturing method therefor which has a rear gas supplying structure preventing a plasma ignition in a gas supplying channel and can easily be manufactured. SOLUTION: A first layer is provided with a supporting surface, a bottom surface and ports between the both. A second ceramic layer is provided under the first ceramic layer. A plenum formed on the second layer supplies thermal transfer gas onto the supporting surface. The first ceramic layer is so sufficiently thinly manufactured as to form many ports having a small diameter passing through between the plenum and the supporting surface. Additionally, plasma ignition in the plenum is prevented by the ports having a small diameter and by the plenum by making the plenum thin.