EQUIPMENT FOR INSPECTING SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To solve the problem of a conventional equipment for inspecting a semiconductor that the wiring for connecting a terminal provided at the cover part of a socket with a circuit board for mounting the socket is disconnected due to opening/closing of the cover. SOLUTION: A terminal 4 for connection with the outer electrode of an MCM 6 is provided on the cover part 2 of an inspection equipment for pressing the MCM 6 and connected electrically with a terminal 9 provided at the base part 1 of the socket oppositely to the cover part 2 through a flexible board 8 laid along the side face of the cover part 2. Furthermore, a terminal 3 being connected directly with the MCM 6 while being buried at the base part 1 is provided in order to reduce the bulk of the terminal (wiring) thus preventing the wiring from being disconnected due to opening/closing of the cover part 2.