| 摘要 |
PROBLEM TO BE SOLVED: To calibrate the intensity of X-rays with high accuracy for a short time in quantitative analysis by an X-ray diffraction method using a monochromator. SOLUTION: In an X-ray diffraction method wherein a sample 2 is irradiated with X-rays emitted from an X-ray source 1 and the intensity of diffracted X-rays reflected from the sample is detected by a detector 3 through a monochromator 5, a standardized sample containing at least the same element as the target of the X-ray source 1 is used to calibrate the intensity of diffracted X-rays in order to perform the quantitative analysis of the sample 2. Since the standardized sample containing at least the same element as the target of the X-ray source 1 is used, fluorescent X-rays of which the kind is same to that of characteristc X-rays generated in the target are also generated from the standardized sample. The fluorescent X-rays are incident on the detector 3 as they are without being removed by the monochromator 5 to be detected as a background. Therefore, the intensity of X-rays of sufficient magnitude required in calibration can be obtained and can be calibrated with high accuracy for a short time.
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