MICRO MIRROR DEVICE AND OPTICAL DISK DEVICE

摘要

PROBLEM TO BE SOLVED: To widen a servo band only by enhancing flexural rigidity of a hinge part without varying twisting rigidity so much in a micro mirror device whose movable part connected with a fixed part via the hinge part is rotated and operated on the hinge part. SOLUTION: A projecting part 14b to project in the thickness direction of the hinge part 14 is formed on at least a part of the hinge part 14. Thus, the flexural rigidity of the hinge part 14 is remarkably enhanced and the servo band is widened.