TRANSMISSION ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To obtain a transmission electron microscope which measures and indicates an amount and directions deviations in a visual field of a reference image recorded after an arbitrary set time relative to a recorded image in a real time and a high degree of accuracy and automatically corrects for the deviations in visual field. SOLUTION: A transmission electron microscope comprises a means for calculating an deviation amount in visual field among a plurality of sample permeation images, a means for changing an electric current given in a deflector for deflecting an electron beam or moving a sample to automatically correct the deviations in visual field, and a control means for repeating this operation means to decrease the deviations in the visual field.